SPO's coated products are manufactured to meet specifications of surface resistance  
and transmittance. Each of the generalized coating processes described below  
involves the reaction of the metallic species with available oxygen to form a uniform,  
oxygen-deficient, semiconducting metal oxide on the substrate surface. Adhesion  
and corrosion resistance for these coatings are excellent. 
Many film designs are available for glass and plastic substrates to meet various  
ohms per square and transmission requirements.  
RFI/EMI Coatings  
Permanent Anti-Static  
Low Reflection ITO  
Transparent Gold  

Applications Include:  
Display Windows  
CRT Windows  
LCD Displays

Display windows can be supplied complete to your specification including substrate  
material, silver busbars, and anti-reflection coatings. 
Electron Beam [E-beam] 

The ITO products using float glass coated both surfaces and coated one surface with  
an anti-reflective coating are applied by E-beam evaporative deposition. 
In each case, ITO evaporation is preceded by the passivation of one or both surfaces  
with SiO2. The AR coating is applied as a separate process, and is a durable, high  
efficiency, multi-layer dielectric coating exhibiting less than 0.4% reflectance at/550nm.  
 
 

Sputtering 

For the bulk of the float glass products, and all of the aluminosilicate, fused quartz  
and polyester films, the ITO coating is applied by reactive sputtering in an oxygen-rich plasma. This process provides a particularly colorless coating having excellent  
transparency, exceptional adhesion, and uniformity. 
 
 

Coatings and Resistance 

Slides or sheets within any one of these brackets ( other than those more explicitly  
specified ) will include some which are at a lower resistance than the limit indicated,  
but none higher than that specified for the bracket. Resistance uniformity on a given  
a part will be very good. Part to part uniformity will only meet the range limitation  
indicated above. 

Iindium-tin oxide (ITO) coating offers superior durability and excellent transmission in  
the visible region. The resistivity can be varied from less than 10 to over 10,000 ohms  
per square.  

ITO can be deposited through a mask to create patterns and combined with other films 
to meet specific drawing requirements. Index-matching films can be deposited  
between the ITO and the glass substrate to attenuate internal back-reflections that  
can reduce contrast and overall transmission.  

Silicon dioxide overcoats can be deposited over the ITO to provide electrical isolation  
or enhanced durability. 

ITO resistance is a function of the coating thickness. For example, a 100 ohm coating  
will be approximately 200 Å thick, whereas a 10 ohm coating will be approximately  
2,000 Å thick. These values are approximate, the actual thickness of the ITO  
depending on the specific stoichometry of the semiconductor as coated.  
The thickness of the glass used in making the various slides ranges from 0.5 mm  
to 3.2 mm. 

General Transmittance Spectra of ITO Coatings

  

Application Notes 

Cleaning and Handling Recommendations 

The following procedure for cleaning ITO should only be performed while wearing  
appropriate safety apparel and eye protection, in a fume hood, under the  
supervision of a qualified chemist. 

Even with careful handling of the transparent conductive coated products which we  
supply, we cannot guarantee them to be contaminant-free. When handling glass  
products in our facilities, we use powder-free non-latex gloves, which in turn are  
covered by nylon or polyester gloves to prevent transferring finger oils to the coated  
surfaces. Parts are packaged with paper slips between to prevent the them from  
rubbing against each other and possibly damaging the ITO coating. Over time, 
organic contaminants may adsorb onto the metal oxide coating, and cleaning  
becomes necessary. 

To clean ITO products, we recommend using a 20% by weight solution of  
ethanolamine in deionized water, heated to 80 ¡ÆC in an ultrasonic bath, within  
an approved fume hood. Immersion of parts in this solution with ultrasonic  
agitation for a period of 10 to 15 minutes is an efficient method for the removal  
of any fingerprints, body oils or similar residual organic contaminants.  
The solution is moderately caustic. Solution vapors can irritate mucous  
membranes and can cause burns, and should be avoided. Following the  
immersion cycle, the substrates should be removed and rinsed several times  
with deionized water, and finally blown dry with a clean, oil-free nitrogen or air  
source to avoid water spotting. 

Alternate methods of cleaning include the use of solvent cleaning solutions in  
conjunction with deionized water rinses, and the use of vapor degreasing systems. 
 
 

Patterning ITO Coatings 

The following procedure for etching ITO should only be performed while wearing  
appropriate safety apparel and eye protection, in an approved fume hood, under the 
supervision of a qualified chemist. 

An aqueous solution of 20% HCl, 5% HNO3, plus a few drops of liquid detergent to  
promote wetting the ITO surface, is efficient in removing ITO. This solution should be  
mixed in an acid-resistant container in a fume hood that is certified for evacuation of 
acidic fumes. Use of this solution heated to 55 ¡ÆC will typically etch 100 ohm ITO  
coatings in 30 to 60 seconds. Since there is some variability in the morphology of  
the coatings, and more conductive coatings will be thicker, this will affect the time  
required to complete the removal of the ITO. If etching is carried out in a room  
temperature solution of the etchant, etching of a 100 ohm coating will take from six  
to ten minutes. Changes in the purity or concentration of the acid solution as it is  
consumed by repeated etching will similarly affect the etch rate. It is important to  
remember that all ITO coatings are readily attacked by mineral acids and strong  
organic acids, and direct exposure to such agents risks loss of the coating.  

Upon completing the etching process, the substrates should immediately be rinsed  
in a 10% aqueous solution of Na2CO3 to neutralize any acid remaining on the coated 
surface. Any subsequent process to remove resist used for generating patterns in the 
coating should be followed by a cleaning process, a series of deionized water rinses,  
and finally blowing dry with a clean, oil-free nitrogen or air source. This final step is  
important to avoid water-spotting, which may have unforeseen effects on any  
subsequent use of the etched coating. 

In conjunction with an appropriate photo/screen resist, this procedure may be used  
to generate patterns in the ITO coating. We have found in our experience with both  
positive- and negative-acting photoresist chemistries, that adhesion of the resist to  
the ITO surface is best when applied to recently cleaned ITO substrates which have  
been subsequently baked for 30 minutes at 175 ¡ÆC within 30 minutes prior to resist 
application. Heating the substrates in this fashion reduces the presence of moisture  
on the surface of the substrate, thus providing better adhesion of the photoresist  
coating. Storage of uncoated ITO in a N2 purged dry box will increase the time during  
which resist may be reliably applied to the ITO surface. In all cases, follow the  
directions of the manufacturer of the resist product being utilized to insure proper  
curing of the coating prior to exposure to the etching solution. 
 
 

Measuring Electrical Characteristics 

We're occasionally asked about the "resistance" of the transparent conductive  
products we offer. The resistance of these transparent, conductive, thin film  
products is measured according to methods outlined in ASTM D 257 ?93, "DC  
Resistance or Conductance of Insulating Materials." A thin film's electrical property  
is generally characterized as surface resistance, Rs, which is the ratio of the dc 
voltage applied to two electrodes on the surface of the sample to the current  
between them. Since the effect of volume resistance is negligible, it is typically  
ignored in films as thin as these. The surface conductivity is the reciprocal of the  
surface resistivity. Surface resistivity, Ps, is the surface resistance, Rs, multiplied  
by the ratio of specimen surface dimensions (width of two parallel electrodes  
defining the current path divided by the distance between them) which converts  
the measured resistance into a value that would be obtained if the electrodes 
formed two opposing sides of a square. While specific resistance is quantified in  
ohms, it is frequently referred to in "ohms/square." In this context, the size of the  
square is immaterial and without dimension. The formula 

Ps = Rs x W / L {P represents the greek letter, rho} 

where Rs is the indicated resistance, W is the length of each of the electrodes,  
and L is distance between them. Current will flow from one electrode to the other.  
Assuming Rs for the example is 80 ohms, and that L = 2W (immediately below),  
we would calculate that

 
Ps = Rs x W / L = 80 ohms x W / 2 W = 80 ohms / 2 = 40 ohms. 

In comparison, measuring in the other direction (immediately above), our ohmmeter  
should indicate Rs = 20 . Since we know that Ps is a ratio of the electrode length to 
the distance between (and that the ratio for our example is now W = 2 L ), we would 
correctly calculate the surface resistivity: 

Ps = Rs x W / L = 20 ohms x 2 L / L = 20 ohms x 2 = 40 ohms 

(Note that the dimensions for L and W cancel, regardless of the size of the sample  
or units of measure, hence the dimensionless "ohms per square".) 

Due to the morphological variability of these coatings, resistance will not be 
isotropic, and measurable differences will be observed based upon the orientation  
of the electrodes with respect to the coating. Since it is not always practical to  
apply conductive bus materials to the thin film coating to make these  
measurements, the probes of a digital volt meter, DVM, may be used to assess  
the relative resistance of the coating, or simply to determine which side is coated. 
Since this kind of measurement will include "fringing" effects, and will typically  
include a significant contact resistance, you should expect to find a resistance  
deviation of up to several times higher than if you were to perform the measurement  
as described above. 

To avoid damaging the thin film coating when determining which side is coated,  
lightly touch the barrels of the probes to the same surface of a single-side coated  
product. Testing the alternate side will quickly show one with a low resistance as  
compared to the opposing side, which will exhibit an essentially infinite resistance.

Lead Attachment / Electrical Contacts 

Establishing good electrical contact with the conductive film is essential, in order to  
best utilize its properties. Unlike metal foils or meshes, an ITO or coating is only  
200 Å to 2,000 Å thick, and point-of-contact probes, or devices such as alligator  
clips may tend to cut through the coating rather than embed into it, as they would  
in a metal sheet or foil. This produces a high resistance contact, which will limit the  
current that can be carried by the coating and may also effect a significant voltage  
drop. 

Two better methods for attachment of leads involve the use of highly conductive  
silver bus compositions. These can be applied to the ITO surface along an edge,  
for example, and dried or cured, depending on whether the composition is a  
thermoplastic or thermoset material. The resulting bus bar provides a highly  
conductive layer in intimate contact with the transparent conductor.  
The attachment of an alligator clip to the bus bar, while it may penetrate the  
transparent conductor, will also make excellent contact with the bus material.  
Since the bus material is several orders of magnitude (from 3 to 5 ) more 
conductive than the transparent semiconductor, contact resistance is minimized 
and any voltage drop a this interface becomes negligible. 

An alternate method of attaching leads to the coatings also uses a conductive  
silver bus composition, but in combination with fine wire (copper, silver, gold,  
platinum) imbedded in the bus material before it is dried/cured. With careful  
handling, this method is very effective. Care must be exercised in manipulating  
the wire, once attached. One good method to employ is to wind a number of  
turns of the wire around a pencil or rod of similar diameter, creating a helical  
"spring" to take the stresses of subsequent handling of the wire as it is attached 
to a current source. Should the lead break loose, it can be re-attached with an  
additional droplet of bus material. 

SPO also offers a special low reflection transparent conductive design that offers  
first surface reflectivity of less than 0.5% across the visible spectrum and 
resistivity of less than 40 ohms per square. This design is used on displays  
and instrument windows that demand RFI/EMI shielding, excellent light 
transmission, and superb contrast enhancement. This family of films is  
extremely durable and stable under various temperature and humidity conditions. 
All coating designs meet or exceed the severe durability requirements of 
MIL-C-48497.